CVD SiC coating ring

The CVD SiC coating ring is one of the important parts of the halfmoon parts. Together with other parts, it forms the SiC epitaxial growth reaction chamber. VeTek Semiconductor is a professional CVD SiC coating ring manufacturer and supplier. According to the customer's design requirements, we can provide the corresponding CVD SiC coating ring at the most competitive price. VeTek Semiconductor looks forward to becoming your long-term partner in China.

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Product Description

There are many small parts in the half-moon parts, and SiC coating ring is one of them.By applying a layer of CVD SiC coating on the surface of high-purity graphite ring by CVD method, we can obtain CVD SiC coating ring. SiC coating ring with SiC coating have excellent properties such as high temperature resistance, excellent mechanical properties, chemical stability, good thermal conductivity, good electrical insulation, and excellent oxidation resistance.CVD SiC coating ring and SiC coating susceptor work together.

SiC coating ring and cooperating susceptor

The functions of the CVD SiC coating ring:

● Flow distribution: The geometric design of the SiC coating ring helps to form a uniform gas flow field, so that the reaction gas can evenly cover the surface of the substrate, ensuring uniform epitaxial growth.

● Heat exchange and temperature uniformity: The CVD SiC coating ring provides good heat exchange performance, thereby maintaining uniform temperature of the CVD SiC coating ring and substrate. This can avoid crystal defects caused by temperature fluctuations.

● Interface blocking: The CVD SiC coating ring can limit the diffusion of reactants to a certain extent, so that they react in a specific area, thereby promoting the growth of high-quality SiC crystals.

● Support function: The CVD SiC coating ring is combined with the disk below to form a stable structure to prevent deformation in high temperature and reaction environment, and maintain the overall stability of the reaction chamber.

VeTek Semiconductor is always committed to providing customers with high-quality CVD SiC coating rings and helping customers complete solutions at the most competitive prices. No matter what kind of CVD SiC coating ring you need, please feel free to consult VeTek Semiconductor!

SEM DATA OF CVD SIC FILM CRYSTAL STRUCTURE：

CVD SIC FILM CRYSTAL STRUCTURE

Basic physical properties of CVD SiC coating：

Basic physical properties of CVD SiC coating
Property	Typical Value
Crystal Structure	FCC β phase polycrystalline, mainly (111) oriented
Density	3.21 g/cm³
Hardness	2500 Vickers hardness（500g load）
Grain SiZe	2~10μm
Chemical Purity	99.99995%
Heat Capacity	640 J·kg^-1·K^-1
Sublimation Temperature	2700℃
Flexural Strength	415 MPa RT 4-point
Young' s Modulus	430 Gpa 4pt bend, 1300℃
Thermal Conductivity	300W·m^-1·K^-1
Thermal Expansion(CTE)	4.5×10^-6K^-1