Wafer Lift Pin

VeTek Semiconductor is a leading EPI Wafer Lift Pin manufacturer and innovator in China.We have been specialized in SiC coating on surface of graphite for many years. We offer a EPI Wafer Lift Pin for Epi process. With high quality and competitive price,we welcome you to visit our factory in China.

Send Inquiry

Product Description

VeTek Semiconductor provide SiC coating and TaC coating material with competitve price and high quality,welcome to inquiry us.

The VeTek Semiconductor EPI wafer lift pin is a key device specifically designed for semiconductor manufacturing. It is used to lift and transport wafers, ensuring their safety and stability during manufacturing.We provide SiC coated wafer lift pin, tip pin, pre-heat ring for EPI process.

Our EPI wafer lift Pins offer the following features and advantages:

High accuracy and stability: Our EPI wafer lift Pins use advanced processes and materials to ensure high accuracy and stability when lifting and handling wafers. It can accurately position and fix wafers, avoiding the deviation and damage of wafers during manufacturing.

Safety and reliability: Our EPI wafer lift Pins are manufactured from high-strength materials for excellent durability and reliability. It is able to withstand weight and pressure, ensuring that the wafer will not be damaged or accidentally dropped during handling.

Automation and efficiency: Our EPI wafer lift Pins are designed to operate autonomously and integrate seamlessly with semiconductor manufacturing equipment. It can lift and move wafers quickly and accurately, increasing production efficiency and reducing the need for manual operations.

Compatibility and applicability: Our EPI wafer lift pins are suitable for a wide range of sizes and types of wafers, including wafers of different diameters and materials. It can be compatible with a variety of semiconductor manufacturing equipment and processes and is suitable for a variety of production environments.

High quality and reliable support: We are committed to providing high quality and reliable products and providing comprehensive support and service to our customers. Our wafer lift Pins undergo rigorous quality control and testing to ensure their performance and durability.

Whether you are in wafer manufacturing, semiconductor research and development or production, our wafer lift Pins provide you with a reliable solution. Contact us to learn more about our wafer lift pin products and start working together for a brilliant future!

Basic physical properties of CVD SiC coating:

Basic physical properties of CVD SiC coating
Property	Typical Value
Crystal Structure	FCC β phase polycrystalline, mainly (111) oriented
Density	3.21 g/cm³
Hardness	2500 Vickers hardness（500g load）
Grain SiZe	2~10μm
Chemical Purity	99.99995%
Heat Capacity	640 J·kg-1·K-1
Sublimation Temperature	2700℃
Flexural Strength	415 MPa RT 4-point
Young' s Modulus	430 Gpa 4pt bend, 1300℃
Thermal Conductivity	300W·m-1·K-1
Thermal Expansion(CTE)	4.5×10-6K-1