Silicon Carbide Wafer Boat

VeTek Semiconductor's high-purity Silicon Carbide Wafer Boat is made of extremely pure silicon carbide material with excellent thermal stability, mechanical strength and chemical resistance. High-purity Silicon Carbide Wafer Boat is used in hot zone applications in semiconductor manufacturing, especially in high-temperature environments, and plays an important role in protecting wafers, transporting materials and maintaining stable processes. VeTek Semiconductor will continue to work hard to innovate and improve the performance of high-purity Silicon Carbide Wafer Boat to meet the evolving needs of semiconductor manufacturing. We look forward to becoming your long-term partner in China.

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Product Description

As the professional manufacturer, VeTek Semiconductor would like to provide you high quality Silicon Carbide Wafer Boat.

Excellent Thermal Performance:VeTek Semiconductor's high-purity Silicon Carbide Wafer Boat have excellent thermal performance, are stable in high-temperature environments, and have excellent thermal conductivity, allowing them to operate at temperatures far above ambient. This makes high-purity Silicon Carbide Wafer Boat ideal for high-power and high-temperature endurance applications.

Excellent corrosion resistance: High-purity Silicon Carbide Wafer Boat is a key tool for semiconductor manufacturing, and it has strong resistance to various corrosive agents. As a reliable carrier, it can withstand the effects of high temperature and corrosion in a chemical environment, ensuring the safe and effective processing of silicon carbide wafers. As a reliable carrier, it can withstand the effects of high temperature and corrosion in a chemical environment, ensuring the safe and effective processing of silicon carbide wafers.

Dimensional integrity: The high-purity Silicon Carbide Wafer Boat does not shrink during the sintering process, maintaining dimensional integrity and eliminating residual stresses that could cause parts to warp or crack. This enables the manufacture of complex-shaped parts with precise dimensions. Whether in the manufacture of semiconductor devices or other industrial fields, high-purity Silicon Carbide Wafer Boat provide reliable dimensional control to ensure that parts meet specifications.

As a versatile tool, VeTek Semiconductor's high-purity Silicon Carbide Wafer Boat can be applied to a variety of semiconductor manufacturing technologies, including epitaxial growth and chemical vapor deposition. Its durable design and non-reactive nature make the high-purity Silicon Carbide Wafer Boat suitable for a variety of processing chemistries, ensuring that it can adapt smoothly to different processing environments.

In semiconductor manufacturing, epitaxial growth and chemical vapor deposition are common process steps used to grow high-quality wafers and thin films. The high-purity SiC boat plays an important role as a carrier, which can withstand the influence of high temperatures and chemicals to ensure accurate growth and deposition processes.

In addition to its durable design, the high-purity SiC boat is also non-reactive. This means that it will not react adversely with processing chemicals, thereby maintaining the integrity and performance of the boat. This provides semiconductor manufacturers with a reliable tool to ensure consistency and repeatability in the production process.

Physical properties of Recrystallized Silicon Carbide

Physical properties of Recrystallized Silicon Carbide
Property	Typical Value
Working temperature (°C)	1600°C (with oxygen), 1700°C (reducing environment)
SiC content	> 99.96%
Free Si content	< 0.1%
Bulk density	2.60-2.70 g/cm3
Apparent porosity	< 16%
Compression strength	> 600 MPa
Cold bending strength	80-90 MPa (20°C)
Hot bending strength	90-100 MPa (1400°C)
Thermal expansion @1500°C	4.70 10-6/°C
Thermal conductivity @1200°C	23 W/m•K
Elastic modulus	240 GPa
Thermal shock resistance	Extremely good