Semiconductor grade Quartz Bell Jar

Semiconductor Grade Quartz Bell Jar is made of high purity quartz material. It has excellent thermal stability and strong corrosion resistance, and is used in many fields. In the semiconductor industry: Semiconductor Grade Quartz Bell Jar provides a controlled environment for thin film deposition on wafers during chemical vapor deposition (CVD). Semiconductor Grade Quartz Bell Jar is also used in processes that require vacuum technology, such as the production of optical coatings, metal coatings, and other types of thin film materials. Semiconductor Grade Quartz Bell Jar is also needed in many physical and material science experiments that require a high purity, vacuum-sealed environment.

Semiconductor industry usage scenarios:

Polysilicon is a silicon material composed of many small grains, which is widely used in integrated circuits, solar cells and other fields. Chemical vapor deposition (CVD) is one of the main methods to prepare polycrystalline silicon. The basic principle is that the silicon source gas, such as SiH4, is decomposed at high temperature and deposited on the substrate to form polycrystalline silicon：

SiHCl3 + H2 ⇒ Si + 3HCl

Under high temperature and vacuum conditions, the silicon source gas was fed into the chemical vapor deposition. Polycrystalline silicon is finally obtained.The Semiconductor Grade Quartz Bell Jar is an important part of the polycrystalline silicon CVD reactor.

Polycrystalline silicon CVD reactor

Under the high temperature reaction of CVD, Semiconductor Grade Quartz Bell Jar can provide a uniform thermal environment. The high temperature resistance of High Purity Quartz material (can withstand temperatures up to about 1100°C) enables it to work stably in CVD reactions and ensure uniform temperature distribution in the reaction area. In the CVD process, there are many toxic gas components, such as PH3, etc. Semiconductor Grade Quartz Bell Jar can effectively isolate the chemical gases in the reaction chamber from the external environment to prevent harmful gas leakage. The corrosion resistance of High Purity Quartz material also enables other materials to work stably for a long time during the CVD process and is not easily corroded or damaged.

The quartz bell jar is used in conjunction with the quartz heat preservation tube and the vertical quartz boat, and is mostly used in the epitaxial process of semiconductor integrated circuit chip production. The epitaxial furnace generally adopts a vertical structure, with the quartz bell jar on the outside of the vertical quartz boat and the quartz heat preservation tube as a support.

Another typical application of Semiconductor Grade Quartz Bell Jar in high temperature environment: To heat a batch of orthodontic parts to 704℃ within 1 second in an inert atmosphere for brazing：

VeTek Semiconductor has a mature technical team. No matter what shape or material of High Purity Quartz Bell Jar you need, we can tailor it for you.

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