Semiconductor Fused Quartz Ring

The role of VeTek's semiconductor fused quartz ring in the etching process

The semiconductor etching process is a critical part of the manufacturing process, which forms complex circuit patterns by removing specific areas of the wafer. This process requires materials that can withstand harsh conditions and maintain stable performance during long-term operation. VeTek's fused quartz rings are optimized to perfectly meet such high-precision requirements and ensure the efficiency and reliability of the etching process.

The main advantages of VeTek's semiconductor fused quartz ring

1. Unparalleled purity

VeTeksemi's fused quartz rings have a SiO₂ purity of up to 99.995% to 99.999%. This high purity level effectively reduces the risk of process contamination and ensures high quality and consistency of etching results. In semiconductor manufacturing, even very small impurities may affect the final performance of the device, so high purity is crucial to improving product quality.

2. Excellent thermal stability

Fused quartz rings are able to maintain excellent stability under extreme temperature conditions, with an operating temperature of up to 1250°C and a softening temperature of up to 1730°C. This allows them to maintain structural integrity and avoid performance degradation in high-temperature etching environments.

3.Very low coefficient of expansion

The low coefficient of thermal expansion of the quartz ring gives it strong resistance to thermal shock. Even with rapid temperature changes during the etching process, the quartz ring can still maintain stability and is not prone to cracking or damage due to thermal stress.

4. Excellent chemical resistance

VeTek's fused quartz rings have strong acid and alkali resistance and can withstand various chemical reagents used in the etching process. This feature ensures long-term stable operation in complex chemical environments and extends its service life.

5. No microbubbles and low hydroxyl content

VeTeksemi's semiconductor-grade quartz rings strictly control the microbubble and hydroxyl content to ensure its stability and reliability in high-precision etching processes. Excessive microbubbles and hydroxyl content may cause process defects and affect the performance of the final device.

6. Low thermal conductivity and excellent dielectric properties

Fused quartz rings have extremely low thermal conductivity and dielectric constant, and their loss tangent is close to the lowest value of all known materials. Low thermal conductivity effectively reduces the risk of wafer overheating, while excellent dielectric properties ensure good electrical insulation, reduce electrical interference, and thus improve the overall efficiency of the etching process.

Through these features, VeTeksemi's fused quartz rings provide a stable and reliable solution in semiconductor manufacturing, helping the smooth progress of high-precision etching processes.

As an advanced Semiconductor Quartz products manufacturer and supplier, VeTeksemi provides a variety of Quartz products like Semiconductor Quartz tank, Quartz Wafer Boat, Semiconductor Quartz Bell Jar and Fused Quartz Crucible. VeTek semiconductor is committed to providing advanced and customizable technology and product solutions for the semiconductor industry. We sincerely hope to become your long-term partner in China.