High Purity Quartz Wafer Boat

VeTek Semiconductor's High Purity Quartz Wafer Boat is made of ultra-high purity quartz, which has the characteristics of low hydroxyl content, high purity, and strong high temperature resistance. This material is also widely used in the semiconductor industry as a material for diffusion furnaces and CVD furnace components. As a container for carrying silicon wafers, High purity Quartz boat wafer has been used in semiconductor, photovoltaic, chemical and other fields.

Application scenarios

First is the semiconductor field.The heat treatment process of wafers is very important, including thermal oxidation, diffusion, annealing, etc. Through the heat treatment process, we give the wafers new characteristics.

Batch furnace core tubes are used for semiconductor wafer processing processes such as thermal oxidation, high temperature diffusion, annealing, and thin film deposition. The batch heating furnace is mainly used to heat the furnace body by coils to complete the heat treatment. According to the different working structures, batch furnace core tubes can be divided into horizontal furnaces and vertical furnaces:

(1)The High purity Quartz Wafer Boat of the horizontal furnace is placed horizontally, so it is called a horizontal furnace.

In the heat treatment process, the wafer is loaded on the High purity Quartz Wafer Boat, slowly sent into the quartz furnace tube, and the wafer is placed in a constant temperature zone for processing. After waiting for the process to be completed, the Wafer used quartz boat is slowly pulled out of the quartz furnace to prevent the wafer from being damaged due to sudden temperature changes. Horizontal furnaces are widely used in the diffusion process of integrated circuits with wafer diameters less than 200mm. 

The advantages of horizontal furnaces are simple process, good uniformity between wafers, and the ability to process multiple wafers at the same time. The disadvantages are slow heating speed, large equipment size, difficulty in automation, and easy entry of external air when loading and unloading wafers.

(2)The High Purity Quartz Wafer Boat of the vertical furnace is placed vertically, so it is called a vertical furnace.

The wafer is loaded on the quartz tower and slowly rises to the quartz furnace tube for heating. During the heating process, the High Purity Quartz Wafer Boat will slowly rotate to ensure that the wafer is heated evenly. After processing, the quartz tower will slowly descend to avoid temperature changes that may cause wafer damage. Vertical furnaces are mainly used in the integrated circuit process of 200mm and 300mm diameter wafers. The core technology of vertical furnaces lies in high-precision temperature field control, particle control, micro-environment micro-oxygen control and motorization. The advantages of vertical furnaces are thin natural oxide layer, good uniformity, easier automation, small equipment footprint, and batch processing. The disadvantage is that the heating speed is slow.

In the photovoltaic field, the production process of photovoltaic cells requires quartz boats to carry and transport silicon wafers in the high-temperature diffusion process. High-temperature treatment in a high-purity nitrogen, oxygen or other inert gas atmosphere, such as phosphorus diffusion or boron diffusion, is an important step in the manufacturing process of solar cells. The purpose is to form a PN junction on the silicon wafer.

The quartz boat has precisely designed slots inside to ensure that the silicon wafer maintains the exact position during the high-temperature diffusion process and is evenly heated. Because the quartz material has good high-temperature resistance and chemical stability, it will not pollute the silicon wafer, which is conducive to maintaining a high cleanliness of the production environment.

As an innovator and leader in China's Wafer used quartz boat market, whether you are engaged in the semiconductor industry or the photovoltaic industry, as long as you need High purity Quartz Wafer Boat, please ask us for a quote and we will be able to tailor it for you according to your needs.

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