Fused Opaque Quartz

Fused opaque quartz is mainly made by electric fusion, which uses high-temperature electric heating to melt high-purity quartz sand to produce quartz glass with a large number of microbubbles with opaque properties. Electric Fused Quartz contains a large number of small bubbles inside, which makes it opaque and helps to reflect and disperse heat. In addition, it has high temperature resistance, low thermal conductivity, good chemical stability, etc. These characteristics make fused opaque quartz an ideal material choice for various processes in semiconductor manufacturing. 

At present, opaque quartz has many key applications in the semiconductor field:

●  Furnace tubes in diffusion and oxidation processes

Fused opaque quartz can be used as furnace tube materials for diffusion furnaces and oxidation furnaces. Its high temperature resistance, thermal shock resistance and good chemical stability ensure that stable chemical properties can be maintained at high temperatures, thereby providing a pollution-free environment and ensuring the stability and consistency of semiconductor processes.

●  Mask plates and isolation materials

In semiconductor processing, fused opaque quartz can be used as mask plates and isolation materials. Due to its opacity and low light transmittance, it can effectively block unnecessary light and heat, preventing the thermal radiation generated in the doping and oxidation diffusion process from affecting other parts. This is especially important for precisely controlling doping and protecting sensitive areas.

●  Crucibles and heating hoods

During the pulling process of semiconductor wafers, Fused Quartz crucibles are used to hold high-temperature molten silicon due to their excellent high-temperature resistance and low thermal conductivity. Low thermal conductivity can reduce heat loss, make heating more uniform, and ensure the stability of single crystal pulling. Fused opaque quartz heating hoods are used for heat insulation, preventing heat loss and improving energy efficiency.

●  Support materials in chemical vapor deposition (CVD)

During the chemical vapor deposition process, fused opaque quartz is used as a wafer support material. Its low thermal conductivity and high temperature resistance help maintain a stable temperature field and prevent overheating or uneven heating. Chemical inertness ensures that it will not react with reactive gases at high temperatures, thereby maintaining the purity and quality of the deposited layer.

●  Heat shielding and insulation components

Semiconductor manufacturing equipment often needs to operate continuously at high temperatures, and the low thermal conductivity and thermal shock resistance of fused opaque quartz make it an ideal heat shielding and insulation component. Using fused opaque quartz as a heat shielding material can effectively reduce energy loss and prevent the heat of the equipment from being transferred to other areas, thereby protecting precision parts.

●  Protective materials in etching and cleaning equipment

Fused opaque quartz has extremely strong acid and alkali resistance, making it a protective material in semiconductor etching and cleaning equipment to prevent corrosive chemicals from damaging the equipment. Its chemical inertness also helps it remain stable in harsh chemical environments and extend the service life of the equipment.

●  Photolithography mask material

The opaque properties of fused opaque quartz can be used as a mask material in specific photolithography processes to help accurately control the exposure area and prevent excess light from affecting sensitive areas of the wafer.

These properties of fused opaque quartz make it a key material in high-precision and high-temperature processes. With the continuous development of semiconductor devices and processes, fused opaque quartz will continue to play an important role in the next generation of manufacturing technology to meet more stringent process requirements.

As a professional Fused Opaque Quartz supplier and manufacturer in China,VeTek Semiconductor is willing and able to provide customers with high-quality fused opaque quartz and looks forward to your inquiry. We sincerely hope to become your long-term partner in China.

VeTek Semiconductor Fused opaque quartz Physical Property

Figure a. Transmittance of fused opaque quartz                                                            Figure b. Reflectivity of fused opaque quartz

VeTek Semiconductor Fused opaque quartz shops