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Tantalum Carbide Guide Ring
  • Tantalum Carbide Guide RingTantalum Carbide Guide Ring

Tantalum Carbide Guide Ring

VeTek Semiconductor is a professional manufacturer and leader of Tantalum Carbide Guide Ring products in China. Our Tantalum Carbide (TaC) Guide Ring is a high-performance ring component made of tantalum carbide, which is commonly used in semiconductor processing equipment, especially in high-temperature and highly corrosive environments such as CVD, PVD, etching and diffusion. VeTek Semiconductor is committed to providing advanced technology and product solutions for the semiconductor industry, and welcomes your further inquiries.

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Product Description

VeTek Semiconductor Tantalum Carbide Guide Ring is crafted from graphite and coated with tantalum carbide, a combination that leverages the best properties of both materials to ensure superior performance and longevity.


The TaC coating on the Tantalum Carbide Guide Ring ensures that it remains chemically inert in the reactive atmospheres of SiC crystal growth furnaces, which often involve gases such as hydrogen, argon, and nitrogen. This chemical inertness is vital to prevent any contamination of the growing crystal, which could lead to defects and reduced performance of the final semiconductor products. Additionally, the thermal stability provided by the TaC coating allows the Tantalum Carbide Coating Guide Ring to operate effectively at the high temperatures required for SiC crystal growth, typically exceeding 2000°C.


Additionally, the combination of graphite and TaC in the Tantalum Carbide Coating Ring optimizes thermal management within the crystal growth furnace. Graphite's high thermal conductivity efficiently distributes heat, preventing hotspots and promoting uniform crystal growth. Meanwhile, the Tantalum Carbide coating serves as a thermal barrier, protecting the graphite core from direct exposure to high temperatures and reactive gases. This synergy between the core and coating materials results in a guide ring that not only withstands the harsh conditions of SiC crystal growth but also enhances the overall efficiency and quality of the process.


The mechanical properties of VeTek Semiconductor Tantalum Carbide greatly reduce wear and tear on the Tantalum Carbide Coating Ring. This is crucial due to the repetitive nature of the crystal growth process, which exposes the guide ring to frequent thermal cycles and mechanical stresses. Tantalum Carbide's hardness and wear resistance ensure that the guide ring maintains its structural integrity and precise dimensions over long periods, minimizing the need for frequent replacements and reducing downtime in the manufacturing process.


VeTek Semiconductor Tantalum Carbide Coating Guide Ring is an essential component in the semiconductor industry, specifically designed for the growth of Silicon Carbide crystals. Its design harnesses the strengths of graphite and tantalum carbide to deliver exceptional performance in high-temperature, high-stress environments. The TaC coating ensures chemical inertness, mechanical durability, and thermal stability, all of which are critical for producing high-quality SiC crystals. By maintaining its integrity and functionality under extreme conditions, the guide ring supports the efficient and defect-free growth of SiC crystals, contributing to the advancement of high-power and high-frequency semiconductor devices.


Tantalum carbide (TaC) coating on a microscopic cross-section:


Tantalum carbide (TaC) coating on a microscopic cross-section 1Tantalum carbide (TaC) coating on a microscopic cross-section 2Tantalum carbide (TaC) coating on a microscopic cross-section 3Tantalum carbide (TaC) coating on a microscopic cross-section 4


Physical properties of TaC coating:


Physical properties of TaC coating
Density
14.3 (g/cm³)
Specific emissivity
0.3
Thermal expansion coefficient
6.3*10-6/K
Hardness (HK)
2000 HK
Resistance
1×10-5 Ohm*cm
Thermal stability
<2500℃
Graphite size changes
-10~-20um
Coating thickness
≥20um typical value (35um±10um)

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