TaC Coating Guide Ring

VeTek Semiconductor is a professional China TaC Coating Guide Ring, TaC coating Crucible, seed holder manufacturer and supplier.

TaC coating Crucible, seed holder and TaC coating Guide Ring in SiC and AIN single crystal furnace were grown by PVT method.

When the physical vapor transport method (PVT) is used to prepare SiC, the seed crystal is in the relatively low temperature region, and the SiC raw material is in the relatively high temperature region (above 2400 ℃). The raw material decomposition produces SiXCy (mainly including Si, SiC₂, Si₂C, etc.). The vapor phase material is transported from the high temperature region to the seed crystal in the low temperature region, and nucleates and grows. To form a single crystal. The thermal field materials used in this process, such as crucible, flow guide ring, seed crystal holder, should be resistant to high temperature and will not pollute SiC raw materials and SiC single crystals. Similarly, the heating elements in the growth of AlN single crystals need to be resistant to Al vapor, N₂ corrosion, and need to have a high eutectic temperature (and AlN) to shorten the crystal preparation period.

It was found that the SiC and AlN prepared by TaC coated graphite thermal field materials were cleaner, almost no carbon (oxygen, nitrogen) and other impurities, fewer edge defects, smaller resistivity in each region, and the micropore density and etching pit density were significantly reduced (after KOH etching), and the crystal quality was greatly improved. In addition, TaC crucible weight loss rate is almost zero, appearance is non-destructive, can be recycled (life up to 200h), can improve the sustainability and efficiency of such single crystal preparation.

Product parameter of the TaC Coating Guide Ring:

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