Solid SiC Disc-shaped Shower Head

The role of the Solid SiC Disc-shaped Shower Head in the CVD process is to evenly distribute the reaction gas above the deposition area so that the gas can be evenly diffused throughout the reactor to obtain a flat and uniform film.

The Solid SiC Shower Head is set at the top of the CVD furnace or near the gas inlet. The reaction gas enters the disc-shaped structure through the holes distributed on the Shower Head and diffuses around along the surface of the Shower Head. Through the multiple channel design and evenly distributed outlets, the reaction gas can flow evenly to the entire reactor area, avoiding concentration or turbulence, and ensuring the consistency of the layer thickness deposited on the substrate.

At the same time, the structure of the Semiconductor Disc shape Shower Head also has a diffusion effect, which can effectively reduce the flow rate of the gas, so that it can be evenly diffused at the nozzle outlet, and reduce the impact of local gas flow changes on the deposition effect. It helps to avoid direct gas impact on the substrate and prevent the problem of uneven deposition.

From the perspective of materials, the Solid SiC Gas Shower Head is made of high-temperature resistant, corrosion-resistant, and high-strength Solid SiC material with very high stability. It can work stably for a long time in the CVD furnace and has a long service life.

VeTek Semiconductor provides high-quality customized services. The shape and hole layout of the Solid SiC Disc-shaped Shower Head can be flexibly adjusted according to the customer's process requirements to adapt to different gas types, flow rates and deposition materials. For different sizes of reactors or substrate sizes, disc-shaped shower heads with different diameters and hole distributions can be customized to optimize the gas distribution effect.

VeTek Semiconductor has mature processes and advanced technologies for Solid SiC Semiconductor Shower Head products, helping a large number of customers to achieve continuous progress in CVD processes. VeTek Semiconductor looks forward to becoming your long-term partner in China.

Physical properties of Solid SiC

VeTek Semiconductor Solid SiC Disc-shaped Shower Head production shops