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China Silicon Carbide Ceramics Manufacturer, Supplier, Factory

VeTek Semiconductor is your innovative partner in the field of semiconductor processing. With our extensive portfolio of semiconductor-grade Silicon Carbide Ceramics material combinations, component manufacturing capabilities, and application engineering services, we can help you overcome significant challenges. Engineering technical Silicon Carbide Ceramics are widely applied in the semiconductor industry due to their exceptional material performance. VeTek Semiconductor's ultra-pure Silicon Carbide Ceramics are frequently used throughout the entire cycle of semiconductor manufacturing and processing.

DIFFUSION & LPCVD PROCESSING

VeTek Semiconductor provides engineered ceramics components specifically designed for batch diffusion and LPCVD requirements including:

• Baffles & holders
• Injectors
• Liners & process tubes
• Silicon Carbide Cantilever Paddles
• Wafer boats and pedestals

SiC Cantilever Paddle SiC Process Tubes Silicon Carbide Process Tube SiC vertical wafer boat SiC horizontal wafer boat SiC horizontals quare wafer boat SiC LPCVD wafer boat SiC horizontal plate boat SiC round wafer boat

ETCH PROCESS COMPONENTS

Minimize contamination and unscheduled maintenance with high- purity components engineered for the rigors of plasma etch processing, including:

Focus rings

Nozzles

Shields

Showerheads

Windows / Lids

Other custom components

RAPID THERMAL PROCESSING & EPITAXIAL PROCESS COMPONENTS

VeTek Semiconductor provides advanced material components tailored for high-temperature thermal processing applications in the semiconductor industry. These applications encompass RTP, Epi processes, diffusion, oxidation, and annealing. Our technical ceramics are designed to withstand thermal shocks, delivering reliable and consistent performance. With VeTek Semiconductor's components, semiconductor manufacturers can achieve efficient and high-quality thermal processing, contributing to the overall success of semiconductor production.

• Diffusers

• Insulators

• Susceptors

• Other custom thermal components

Physical properties of Recrystallized Silicon Carbide
Property	Typical Value
Working temperature (°C)	1600°C (with oxygen), 1700°C (reducing environment)
SiC / SiC content	> 99.96%
Si / Free Si content	< 0.1%
Bulk density	2.60-2.70 g/cm3
Apparent porosity	< 16%
Compression strength	> 600 MPa
Cold bending strength	80-90 MPa (20°C)
Hot bending strength	90-100 MPa (1400°C)
Thermal expansion @1500°C	4.70 10-6/°C
Thermal conductivity @1200°C	23 W/m•K
Elastic modulus	240 GPa
Thermal shock resistance	Extremely good

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SiC Process Tube

VeTek Semiconductor provides high-performance SiC Process Tubes for semiconductor manufacturing. Our SiC Process Tubes excel in oxidation, diffusion processes. With superior quality and craftsmanship, these tubes offer high-temperature stability and thermal conductivity for efficient semiconductor processing. We offer competitive pricing and seek to be your long-term partner in China.

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SiC Cantilever Paddle

VeTek Semiconductor's SiC Cantilever Paddle is a very high performance product. Our SiC Cantilever Paddle is usually used in heat treatment furnaces for handling and supporting silicon wafers, chemical vapor deposition (CVD) and other processing processes in semiconductor manufacturing processes. The high temperature stability and high thermal conductivity of SiC material ensure high efficiency and reliability in the semiconductor processing process. We are committed to providing high-quality products at competitive prices and look forward to becoming your long-term partner in China.

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Silicon Carbide Wafer Boat for Horizontal Furnace

VeTek Semiconductor is a professional manufacturer and supplier in China for silicon carbide wafer boat for horizontal furnace, with years of experience in R&D and production, can control the quality well and offer a competitive price. You can rest assured to buy the silicon carbide wafer boat for horizontal furnace from us.

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SiC Coated Silicon Carbide Wafer Boat

VeTek Semiconductor is professional manufacturer and supplier in China for SiC coated silicon carbide wafer boat, with years of experience in R&D and production, can control the quality well and offer a competitive price. Welcome for visiting our factory and have further discussion on cooperation.

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Silicon Carbide Cantilever Paddle

VeTek Semiconductor's Silicon Carbide Cantilever Paddle is an important component in the semiconductor manufacturing process, especially suitable for diffusion furnaces or LPCVD furnaces in high-temperature processes such as diffusion and RTP. Our Silicon Carbide Cantilever Paddle is carefully designed and manufactured with excellent high-temperature resistance and mechanical strength, and can safely and reliably transport wafers to the process tube under harsh process conditions for various high-temperature processes such as diffusion and RTP. We look forward to becoming your long-term partner in China.

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High Pure Silicon Carbide Wafer Carrier

VeTek Semiconductor High Pure Silicon Carbide Wafer Carrier are important components in semiconductor processing, designed to safely hold and transport delicate silicon wafers, playing a key role in all stages of manufacturing. VeTek Semiconductor's High Pure Silicon Carbide Wafer Carrier are carefully designed and manufactured to ensure excellent performance and reliability. VeTek Semiconductor is committed to providing quality products at competitive prices, and we look forward to being your long-term partner in China.

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As a professional Silicon Carbide Ceramics manufacturer and supplier in China, we have our own factory. Whether you need customized services to meet the specific needs of your region or want to buy advanced and durable Silicon Carbide Ceramics made in China, you can leave us a message.