Semiconductor quartz boat

In the semiconductor process, the transportation of wafers is particularly important. Semiconductor quartz boats are very good at transporting wafers and are suitable for processes such as diffusion, oxidation, and CVD. VeTek Semiconductor is a leading manufacturer and supplier of semiconductor quartz boats in China, and is capable of providing customers with highly customized products.Welcome your further consultation.

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Product Description

Semiconductor quartz boat is a high-purity quartz product used in semiconductor manufacturing process. Its main function is to carry and transfer wafers in high-temperature furnaces. It is widely used in precision industries such as semiconductors, optoelectronics, and LEDs. Suitable for diffusion, oxidation, CVD and other processes.

Semiconductor quartz boat working diagram

Product Features：

• High purity: Semiconductor quartz boat uses high-purity quartz material with extremely low impurity content, effectively avoiding metal ion pollution, and is suitable for the clean environment requirements of semiconductor processes.

• High temperature resistance: It has excellent high temperature resistance and can be used stably for a long time in an environment up to 1200℃.

• Corrosion resistance: It has good corrosion resistance to most chemical reagents such as acids and alkalis, so it can adapt to the chemical environment in semiconductor equipment such as CVD furnaces.

• Good thermal stability: Low thermal expansion coefficient, not easy to deform when heated, suitable for frequent heating and cooling processes.

Parameters	Specifications
Material	High-purity quartz
Outer diameter	Customized as required
Length	Customized as required
Thermal stability	Stable operation at 1200°C

Specifications

• Improve production efficiency: compact design, easy wafer transfer, and improved process capacity.

• Reduce contamination risk: high-purity quartz material, reducing trace impurity contamination in the process.

• Long life and durability: high temperature and corrosion resistance, suitable for high-frequency use, reducing replacement costs.

Vetek Semiconductor is committed to providing customers with high-quality, high-purity quartz boat products. All products are strictly quality controlled to ensure that they meet the high standards of the semiconductor industry.