PECVD Graphite Boat

Vetek Semiconductor's PECVD graphite boat optimizes solar cell coating processes by spacing silicon wafers effectively and inducing glow discharge for uniform coating deposition. With advanced technology and material choices, Vetek semiconductor's PECVD graphite boats enhance silicon wafer quality and boost solar energy conversion efficiency.Pls no hesitate to inquiry us.

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Product Description

VeTek Semiconductor is a professional China PECVD graphite boat manufacturer and supplier.

What is the role of VeTek Semiconductor's solar cell (coating)PECVD graphite boat?

As a carrier of normal silicon wafers produced by the coating process, the PECVD graphite boat has many boat wafers with certain intervals in the structure, and there is a very narrow space between the two adjacent boat wafers, and the silicon wafers are placed on both sides of the empty door.

Because the PECVD graphite boat material graphite has good electrical and thermal conductivity properties, the AC voltage is asked in the two adjacent boats, so that the two adjacent boats form positive and negative poles, when there is a certain pressure and gas in the chamber, glow discharge occurs between the two boats, glow discharge can decompose the SiH4 and NH3 gas in the space, forming Si and N ions. SiNx molecules are formed and deposited on the surface of silicon wafer to achieve the purpose of coating.

PECVD graphite boat as a carrier for solar cell plating antireflection film, its structure and size directly affect the conversion efficiency and production efficiency of silicon wafers, after years of technical research and development, our factory now has advanced production equipment, mature technology designers and experienced production staff, and materials can choose imported raw materials or high-end domestic materials. At present, the graphite house manufactured by our company has a simple structure, reasonable distance from the graphite boat, which makes the silicon coating uniform, improve the quality of the silicon wafer, and make the solar energy conversion efficiency is high.

Vetek Semiconductor has all types of graphite boats that the market needs now.

Basic physical properties of isostatic graphite:

Physical properties of isostatic graphite
Property	Unit	Typical Value
Bulk Density	g/cm³	1.83
Hardness	HSD	58
Electrical Resistivity	μΩ.m	10
Flexural Strength	MPa	47
Compressive Strength	MPa	103
Tensile Strength	MPa	31
Young' s Modulus	GPa	11.8
Thermal Expansion(CTE)	10-6K-1	4.6
Thermal Conductivity	W·m-1·K-1	130
Average Grain Size	μm	8-10
Porosity	%	10
Ash Content	ppm	≤5 (after purified)