Electric Fused Quartz

Electric fused quartz is made of high-purity silicon tetrachloride (SiCl₄) as raw material and refined by hydrogen-oxygen flame melting process. Electric fused quartz has no bubbles inside and has excellent performance and stability, ensuring long-term stable use in harsh optical and semiconductor environments. At present, Electro fused quartz has been widely used in the semiconductor and optical fields.

Semiconductor field

●  Electric fused quartz plays an important role in the manufacturing and processing of semiconductor wafers and is usually used as components such as wafer holders, carriers and diffusion tubes. Its high temperature stability and corrosion resistance ensure the purity and stability of the material under high temperature and harsh chemical environments, and its low expansion coefficient ensures dimensional stability during high temperature processing.

●  Photolithography mask. In semiconductor manufacturing, Quartz crucible Ceramic is also used as a substrate material for photolithography mask. Its high purity and excellent optical transparency enable precise pattern transfer during ultraviolet and deep ultraviolet (DUV) lithography.

●  Gas diffusion tubes and reaction chambers. Diffusion tubes and reaction chambers made of electric fused quartz are ideal materials for processes such as (CVD), oxidation, and diffusion. These components have excellent corrosion resistance at high temperatures and will not react with reactive gases, thereby avoiding the introduction of impurities and improving product quality.

Optical field

●  High-precision optical components. Electric fused quartz is often used to manufacture optical components such as lenses, prisms, and reflectors due to its high transmittance and uniformity, especially in applications requiring high transmittance and low dispersion.

●  UV and deep UV optical applications. Electric fused quartz has excellent optical transmittance in the UV and deep UV bands, making it particularly suitable for UV optical systems. Its high purity and low impurity content reduce light absorption in the UV band, making it an important material in deep UV optical systems.

●  Laser optical components. In high-energy laser systems, Quartz crucible Ceramic is often used to manufacture components such as laser windows, beam splitters, and filters due to its resistance to high-energy laser shock and low birefringence. Its high-purity structure avoids light loss and thermal deformation, making it an ideal choice for high-power laser systems.

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