China Silicon Carbide Ceramics Manufacturer, Supplier, Factory

VeTek Semiconductor is your innovative partner in the field of semiconductor processing. With our extensive portfolio of semiconductor-grade Silicon Carbide Ceramics material combinations, component manufacturing capabilities, and application engineering services, we can help you overcome significant challenges. Engineering technical Silicon Carbide Ceramics are widely applied in the semiconductor industry due to their exceptional material performance. VeTek Semiconductor's ultra-pure Silicon Carbide Ceramics are frequently used throughout the entire cycle of semiconductor manufacturing and processing.

DIFFUSION & LPCVD PROCESSING

VeTek Semiconductor provides engineered ceramics components specifically designed for batch diffusion and LPCVD requirements including:

• Baffles & holders
• Injectors
• Liners & process tubes
• Silicon Carbide Cantilever Paddles
• Wafer boats and pedestals

SiC Cantilever Paddle SiC Process Tubes Silicon Carbide Process Tube SiC vertical wafer boat SiC horizontal wafer boat SiC horizontals quare wafer boat SiC LPCVD wafer boat SiC horizontal plate boat SiC round wafer boat

ETCH PROCESS COMPONENTS

Minimize contamination and unscheduled maintenance with high- purity components engineered for the rigors of plasma etch processing, including:

Focus rings

Nozzles

Shields

Showerheads

Windows / Lids

Other custom components

RAPID THERMAL PROCESSING & EPITAXIAL PROCESS COMPONENTS

VeTek Semiconductor provides advanced material components tailored for high-temperature thermal processing applications in the semiconductor industry. These applications encompass RTP, Epi processes, diffusion, oxidation, and annealing. Our technical ceramics are designed to withstand thermal shocks, delivering reliable and consistent performance. With VeTek Semiconductor's components, semiconductor manufacturers can achieve efficient and high-quality thermal processing, contributing to the overall success of semiconductor production.

• Diffusers

• Insulators

• Susceptors

• Other custom thermal components

Physical properties of Recrystallized Silicon Carbide
Property	Typical Value
Working temperature (°C)	1600°C (with oxygen), 1700°C (reducing environment)
SiC / SiC content	> 99.96%
Si / Free Si content	< 0.1%
Bulk density	2.60-2.70 g/cm3
Apparent porosity	< 16%
Compression strength	> 600 MPa
Cold bending strength	80-90 MPa (20°C)
Hot bending strength	90-100 MPa (1400°C)
Thermal expansion @1500°C	4.70 10-6/°C
Thermal conductivity @1200°C	23 W/m•K
Elastic modulus	240 GPa
Thermal shock resistance	Extremely good

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Silicon Carbide Wafer Boat

VeTek Semiconductor's high-purity Silicon Carbide Wafer Boat is made of extremely pure silicon carbide material with excellent thermal stability, mechanical strength and chemical resistance. High-purity Silicon Carbide Wafer Boat is used in hot zone applications in semiconductor manufacturing, especially in high-temperature environments, and plays an important role in protecting wafers, transporting materials and maintaining stable processes. VeTek Semiconductor will continue to work hard to innovate and improve the performance of high-purity Silicon Carbide Wafer Boat to meet the evolving needs of semiconductor manufacturing. We look forward to becoming your long-term partner in China.

Ultra Pure Silicon Carbide Powder for Crystal Growth

VeTek Semiconductor is a professional manufacturer and supplier, dedicated to providing high-quality Ultra Pure Silicon Carbide Powder for Crystal Growth. With a purity of up to 99.999% wt and extremely low impurity levels of nitrogen, boron, aluminum, and other contaminants, it is specifically designed to enhance the semi-insulating properties of high-purity silicon carbide. Welcome to inquire and cooperate with us!