CVD SiC coating rigid felt

As an important part of the SiC coating halfmoon graphite parts, CVD SiC coating rigid felt plays an important role in heat preservation during the SiC epitaxial growth process. VeTek Semiconductor is a mature CVD SiC coating rigid felt manufacturer and supplier, which can provide customers with suitable and excellent CVD SiC coating rigid felt products. VeTek Semiconductor looks forward to becoming your long-term partner in the epitaxial industry.

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Product Description

CVD SiC coating rigid felt is a component obtained by CVD SiC coating on the surface of graphite rigid felt, which acts as a heat insulation layer. CVD SiC coating has excellent properties such as high temperature resistance, excellent mechanical properties, chemical stability, good thermal conductivity, electrical insulation, and excellent oxidation resistance. So, CVD SiC coating rigid felt has good strength and high temperature resistance, and is usually used for heat insulation and support of epitaxial reaction chambers.

High Purity Graphite Rigid Felt Properties：

● High temperature resistance: CVD SiC coating rigid felt can withstand temperatures of up to 1000℃ or more, depending on the type of material.

● Chemical stability: CVD SiC coating rigid felt can remain stable in the chemical environment of epitaxial growth and withstand the erosion of corrosive gases.

● Thermal insulation performance: CVD SiC coating rigid felt has good thermal isolation effect and can effectively prevent heat from dissipating from the reaction chamber.

● Mechanical strength: SiC coating hard felt has good mechanical strength and rigidity, so that it can still maintain its shape and support other components at high temperatures.

Rigid Graphite Felt Function:

● Thermal isolation: CVD SiC coating rigid felt provides thermal insulation for SiC epitaxial reaction chambers, maintains the high temperature environment in the chamber, and ensures the stability of epitaxial growth.

● Structural support: CVD SiC coating rigid felt provides support for halfmoon parts and other components to prevent possible deformation or damage under high temperature and high pressure.

● Gas flow control: It helps to control the flow and distribution of gas in the reaction chamber, ensuring the uniformity of gas in different areas, thereby improving the quality of the epitaxial layer.

VeTek Semiconductor can provide you with customized CVD SiC coating rigid felt according to your needs. VeTek Semiconductor is waiting for your inquiry.

the Basic physical properties of CVD SiC coating:

Basic physical properties of CVD SiC coating
Property	Typical Value
Crystal Structure	FCC β phase polycrystalline, mainly (111) oriented
Density	3.21 g/cm³
Hardness	2500 Vickers hardness（500g load）
Grain Size	2~10μm
Chemical Purity	Chemical Purity99.99995%
Heat Capacity	640 J·kg^-1·K^-1
Sublimation Temperature	2700℃
Flexural Strength	415 MPa RT 4-point
Young' s Modulus	430 Gpa 4pt bend, 1300℃
Thermal Conductivity	300W·m^-1·K^-1
Thermal Expansion(CTE)	4.5×10^-6K^-1