High purity rigid felt

VeTek Semiconductor is one of the leading manufacturers and suppliers of High purity rigid felt. High purity rigid felt is mainly used for the heat preservation of the half-moon parts in SiC epitaxial growth, and is the core component to ensure the uniform growth of SiC epitaxy. VeTek Semiconductor is always committed to providing you with the right High purity rigid felt and tailoring the best solution for you.

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Product Description

SiC epitaxial growth is a technology for growing high-quality silicon carbide thin films on the surface of a substrate. This process is essential for manufacturing high-performance silicon carbide semiconductor devices, such as silicon carbide power devices and silicon carbide RF devices. In this process, the growth environment, including temperature, gas flow, pressure and other parameters, needs to be strictly controlled to ensure the growth of high-quality, high-purity silicon carbide epitaxial layers with good electrical properties. SiC coatig Halfmoon graphite parts is the core component of SIC epitaxial growth, and High purity rigid felt mainly plays the role of heat preservation of SiC coatig Halfmoon graphite parts.

silicon carbide epitaxial growth furnace and core accessories

High purity rigid felt has good thermal conductivity, which can evenly distribute the heat of the heating source around the SiC coatig Halfmoon graphite parts and has a good heat preservation effect. During SiC epitaxial growth, it can absorb heat and release it slowly to avoid local overheating or overcooling, so that the temperature difference on the surface of the silicon carbide substrate is controlled within a very small range, and the temperature uniformity can usually reach ±1 - 2℃, which is very important for growing a silicon carbide epitaxial layer with uniform thickness and consistent electrical properties.

Some corrosive gases, such as silane (SiH4) and propane (C3H8), are used as reaction source gases in SiC epitaxial growth. High purity rigid felt has good tolerance to these chemical gases, and can maintain its structural integrity throughout the epitaxial growth cycle (which may last for hours or even dozens of hours). And the purity of High purity rigid felt is above 99.99%, and it will not release substances that may contaminate the epitaxial layer into the reaction environment, thereby ensuring the high purity of the silicon carbide epitaxial layer.

The appropriate density can ensure the mechanical strength and thermal conductivity of High purity rigid felt. While ensuring thermal conductivity, it can minimize the interference of external factors on SiC epitaxial growth.

Compared with traditional ceramic materials and metal materials, high purity graphite rigid felt has better thermal conductivity and chemical stability, and is an excellent auxiliary component material for SiC epitaxial growth.

As a leading China High purity rigid felt supplier and factory, VeTek Semiconductor provides highly customized products, whether it is materials or product size, it can be tailored for you.Moreover, VeTek Semiconductor has long been committed to providing advanced High purity rigid felt technology and product solutions for the semiconductor industry. We sincerely look forward to becoming your long-term partner in China.